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Luxtron® M-1200 Fiber Optic Temperature Converter
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High-accuracy temperature measurement in a compact design
Smaller, more accurate, and with a broader measurement range (-200 to 450°C ) than many other contact temperature sensing devices, the Luxtron M-1200 expands process development possibilities. Its ultra-fast EtherCAT(R) communication, low-noise electronics, flexible probe configurations, and compact form factor streamline integration into complex semiconductor tools.
特徴
- Wide supported temperature range (-200 to 450°C )
- Low noise level with fast response rate
- Five channels in a single converter
- EtherCAT communications
- DIN rail mounting
メリット
- Contact measurement to minimize the thermal offset
- Reduced form factor for easy installation and integration
- High accuracy and extreme temperature control for a variety of etch and wafer fab processes
- Support from experienced applications engineers to customize probes for OEMs
仕様
| 動作温度範囲 (°C): | 0 to 60 |
|---|---|
| チャンネル数: | Up to 5 |
| 精度: | ± 0.15 °C |
| 騒音 (°C): | 0.1 °C |
| 測定範囲: | -200 to 450 |
| 通信インターフェース: | EtherCAT |
| 読み出し速度（Hz）: | 2 to 50 |
| センサー数: | Up to 5 |
技術文書
Product Information Documents
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