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Ascent AP Pulsed and DC Power System
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Unprecedented Power Control for Single- and Dual-Magnetron Sputtering
Building on AE®’s premier bipolar pulsed-DC technology, Ascent® AP power supplies extend your ability to optimize output with advanced pulse shaping, as well as four-block progressive arc management that includes full voltage reversal and self-adjusting arc parameters. This compact solution’s patented pulsing technology proactively inhibits arcs, while its wide operational range unlocks material options to extend single- and dual-magnetron process flexibility and material innovation.
特徴
- Process customization with extensive power delivery parameters
- Advanced process management through a tiered approach to arc mitigation
- Compact, single-unit solution (up to 30 kW)
- Set Point Compensation™ technology for stable throughput
- Wide operational range to enable a variety of process materials
- Compatible with PowerInsight by Advanced Energy™
メリット
- Precise sputtering of dielectric and conductive films
- Expanded process control, flexibility, and innovation
- High film quality and throughput
- Repeatable, customizable films
- Higher power levels with reduced arc damage
- Easy integration and control
仕様
| 冷却: | Hybrid (air and water) |
|---|---|
| 出力周波数（MHz、kHz）: | 5 to 150 kHz |
| 入力電圧 (V): | 400, 440, 440-480 VAC |
| 出力レベル（kW）: | 10 to 30 kW |
| ラック幅: | Full rack |
| 高さ（インチ）: | 4U, 6U |
| 出力電圧範囲 (V): | 400-1000V |
| 通信インターフェース: | Ethernet, EtherCAT, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
Featured Resources
Ascent AP Data Sheet
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PowerInsight by Advanced Energy
PowerInsight acts as a flight recorder, capturing AE power delivery system performance data. Download PowerInsight brochure to see how AE's IoT solutions meet your needs.
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Ascent SMS AP 10 Brochure
The Ascent SMS AP10 power supply is a highly configurable pulsed-DC solution embedded with AE's PowerInsight IIoT platform.
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技術文書
Product Information Documents
Insights & Studies
テクニカル・ビデオ
Exclusive Dynamic Reverse Pulsing Technology for Plasma Power
10月 18, 2024
Dynamic Reverse Pulsing (DRP) is an AE patented power deliver configuration for coating large-area substrates that is exclusive to AE plasma power products. See how DRP provides synchronous power delivery to increase throughput and flexibility of coating systems.
Learn more:
• Ascent AMS II Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ams-ii/
• Ascent DMS Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-dms/
• Ascent AP Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ap/
• Glass: https://www.advancedenergy.com/en-us/applications/industrial/manufacturing/glass/
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