Dynamic Reverse Pulsing in an Industrial Setup: Case Study on SiO2 Deposition
4月 18, 2023
By Gayatri Rane
With new power delivery technologies and techniques, Advanced Energy keeps pace with today’s magnetron sputtering requirements, including the rapid rise in the use of rotatable cylindrical targets and the ever-growing need for thermal-load control onto sensitive substrates.
Studies of Dynamic Reverse Pulsing and Bipolar Reactive Sputtering of Silicon Oxide Films with No Detectable Inclusion of Anode Material
10月 13, 2020
In our recent blog post, we demonstrated how silicon dioxide thin films can be sputtered with a reliably high quality and rate in an inline coating machine at our Customer Solutions Lab in Karlstein, Germany. Comparisons were made for films sputtered at a high argon flow, and thus higher-pressure, during deposition and a low argon flow and thus a lower deposition pressure.
Q&A: How Advanced Energy’s Customer Solutions Lab is Innovating the Future of Thin Films
10月 08, 2020
By Uwe Krause
Advanced Energy’s Customer Solutions Lab opened in the fall of 2019, establishing a new resource for our customers to explore new thin-film innovations without disrupting production timelines while offering greater flexibility for R&D.
Comparison of AC/Sine Wave vs Bipolar Pulse Dual Magnetron Sputtering of Transparent a-IGZO Coatings used in Flat Panel Displays
4月 14, 2020
By Gayatri Rane
Indium gallium zinc oxide (InGaZnO or for short IGZO), first proposed in 2003, has become a leading candidate for transparent semiconductor thin film transistors (TFT), and rapidly driving innovations within TFTs due to its high performance and compatibility with diverse flat panel display (FPD) technologies.
Dynamic Reverse Pulsing Enables High Deposition Rate at Lower Total Cost of Ownership for Reactive Sputtering on Heat-Sensitive Substrates
4月 07, 2020
You might not be consciously aware of it, but there’s a good chance one of the reasons you chose the smartphone you have is that it felt good in your hands. A lot of time, thought and research went into making it feel “just right” to you.