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Saeed Mirzaei
Advanced Energy
Saeed Mirzaei is a Senior R&D Scientist at Advanced Energy, where he develops advanced power solutions for thin film and plasma processes. He holds a Ph.D. in Plasma Physics and has authored multiple publications in peer-reviewed journals. Prior to joining Advanced Energy, he worked in both fundamental and industrial R&D at Fraunhofer IWS and the Central European Institute of Technology (CEITEC).
掲載記事 Saeed Mirzaei
Blog
Reactive Sputtering Process Stability Reinforced by Advanced Energy’s Power Delivery Technology
6月 22, 2026
This blog explores how oxygen and water vapor dynamics shape plasma behavior and TiO₂ film quality in reactive sputtering. Using Advanced Energy’s Ascent AMS and Ascent DMS power supplies, AE experts demonstrate how advanced pulsed‑DC regulation stabilizes deposition despite fluctuating reactive conditions. The study introduces a unified p* parameter that correlates gas effects with deposition rate and optical properties, offering a predictive path to more uniform, high‑performance oxide coatings.