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Pinnacle III Plus+ Pulsed DC Power Supply
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films
- Charge clearing during the reverse pulse prevents arcs from developing
- Adjustable process through frequency and duty cycle control
- Compact air-cooled design expandable in main/satellite configurations
特点
- Adjustable frequency range of 5 to 350 kHz
- Variable duty cycle up to 45%
- Wide voltage range — single-tap wide impedance range
- Superior arc management
- Dual output available for multi-chamber production
益处
- Higher deposition and yield rates
- Superior film uniformity and quality
- Reduced substrate damage caused by arcing
- Excellent process flexibility and latitude
- Repeatable performance
规格
| 冷却: | Air |
|---|---|
| 输出频率（兆赫、千赫）: | 5 to 350 kHz |
| 输入电压 (V): | 208, 400, 440, 480 VAC |
| 功率等级（千瓦）: | 1.5 to 10 kW |
| 机架宽度: | Full rack |
| 高度（英寸）: | 3U |
| 输出电压范围 (V): | 325-800 V |
| 通信接口: | Ethernet, EtherCAT, DeviceNet, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
Featured Resources
Pinnacle Plus Data Sheet
Download Pinnacle Plus+ Series Brochure for details regarding product specifications, electrical specifications, mechanical specifications and ordering information. Discover how Pinnacle Plus+'s superior efficiency, and high power factor meet your needs.
Pinnacle Plus+ Halo Pulsed-DC Power Supplies Datasheet
PowerInsight by Advanced Energy
PowerInsight acts as a flight recorder, capturing AE power delivery system performance data. Download PowerInsight brochure to see how AE's IoT solutions meet your needs.
技术文档
服务
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
Refurbishments
Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.
Conversion
Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
