Sekidenko 401M Series

Active

High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.

Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The 401M supports EtherCAT, USB, Serial and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding process applications.

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特徴

•   Built-in EtherCAT capability.
•   High-speed (up to 1kHz).
•   Non-contact temperature measurement with lens-based optics
•   Automatic ambient thermal correction
•   Industry-leading temperature range and read rates
•   Highly flexible, module-based platform architecture
•   Full I/O and external trigger/synchronization capability

メリット

•   Improves temperature measurement accuracy for critical processes
•   Enhances process repeatability and minimizes variation
•   Increases productivity, yield, and throughput
•   Increases stability and reliability across multiple chambers and substrate materials

仕様

動作温度範囲 (°C):	15 to 40°C
スペクトル範囲 (µm):	1.7um – 6um (2.7, 3.3, & 5.2um typical)
FOV（最小スポットサイズ）（mm）:	≥1mm
アライメント／照準:	Sighting: None. Alignment: Mechanical alignment included in front housing
インターフェース/出力（mA）:	Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K
精度:	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)
測定範囲:	50 to 1300C
測定精度(%):	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)