Sekidenko 401M Series

Active

High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.

Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-wavelength pyrometer range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel non contact temperature measurement capability for thin-film solar, glass pyrometer applications, and advanced semiconductor temperature measurement processes. The 401M supports EtherCAT, USB, Serial, and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding industrial high temperature pyrometer applications.

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特徴

•   Built-in EtherCAT capability.
•   High-speed (up to 1kHz).
•   Non-contact temperature measurement with lens-based optics
•   Automatic ambient thermal correction
•   Industry-leading temperature range and read rates
•   Highly flexible, module-based platform architecture
•   Full I/O and external trigger/synchronization capability

メリット

•   Improves temperature measurement accuracy for critical processes
•   Enhances process repeatability and minimizes variation
•   Increases productivity, yield, and throughput
•   Increases stability and reliability across multiple chambers and substrate materials

仕様

動作温度範囲 (°C):	15 to 40°C
スペクトル範囲 (µm):	1.7um – 6um (2.7, 3.3, & 5.2um typical)
FOV（最小スポットサイズ）（mm）:	≥1mm
アライメント／照準:	Sighting: None. Alignment: Mechanical alignment included in front housing
インターフェース/出力（mA）:	Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K
精度:	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)
測定範囲:	50 to 1300C
測定精度(%):	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)