Thyro-XD™ SCR Power Controller

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Exacting Temperature Control

The Thyro-XD SCR power controller provides unprecedented speed and precision in semiconductor and industrial processes. It delivers exacting temperature control in lamp-based heating, even during rapid and dynamic heat ramps. Enhanced accuracy in load resistance measurement allows faster detection of temperature changes, while increased precision in voltage and current measurement enables swift compensation for input fluctuations. Compact and power-dense for semiconductor tools, the Thyro-XD delivers twice the control capacity in the same amount of space as previous technologies.

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特徴

Enhanced voltage measurement and internal thermal management without fans
Exclusive low harmonic distortion operation mode (VT)
Multiple communications, control types, and operation modes
Wide range of voltage input at 30 A current rating with high power measurement
Sensitive load resistance change detection

メリット

Optimal response time, control, stability, and repeatability
Easy integration into existing control systems
Precise, real-time temperature control with Impac pyrometer integration
Cost- and size-optimized solution for small cabinets
Increased process efficiency

仕様

周波数 (Hz):	47 to 63
ヒューズ:	Integrated semiconductor fuse
動作モード:	TAKT, VAR, VT Mode
定格電流 (A):	30
定格電圧 (V):	Up to 500 Vac
安全認証:	CE
定格電圧 AC (V):	24 to 550