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Apex RF Generator
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High-Power Density for Compact Installation
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
特徴
- High power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
メリット
- Readily integrate process tools with enhanced flexibility
- Stabilize plasma operation
- Improve yield for fast arc management
- Easily customize and configure to your process requirements
仕様
| 冷却: | water |
|---|---|
| 出力周波数（MHz、kHz）: | 13.56 MHz |
| 入力電圧 (V): | 208 VAC |
| 出力レベル（kW）: | 1.5 to 10 kW |
| ラック幅: | 1/2 rack and full rack |
| 高さ（インチ）: | 3U |
| 通信インターフェース: | RS-232, Analog, ethernet, DeviceNet |
| 高度な機能: | Pulsing, CEX |
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