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Ascent AMS II Pulsed and DC Power System

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Stable, Repeatable Power | Water Cooling | Embedded IoT intelligence

New materials and cathode designs increasingly challenge process stability and film repeatability. At the same time, larger deposition areas heighten power requirements and potential arc-related damage. Ascent® AMS II provides stable, repeatable power regardless of process setup or conditions. Its Arc Management System™ (AMS) technology and onboard, embedded IoT intelligence maximize productivity and throughput. This low-noise, water-cooled design with expanded operating range also increases reliability, process capability, and installation flexibility.

特徴

  • Water cooling
  • Modular and scalable
  • Embedded PowerInsight by Advanced Energy™ IoT intelligence
  • Wide mains voltage range
  • Expanded operating range
  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc-Sync™ technology — primary/secondary up to 12 units
  • Ethernet, EtherCAT®, Profibus, RS-232/485, Ethernet/IP, and analog communications

メリット

  • High film quality and throughput
  • Reduced film, substrate, and equipment damage
  • Stable throughput and power delivery
  • Easy integration and control
  • Fast scaling to achieve high power levels

仕様

冷却: Water
入力電圧 (V): 360 to 528 VAC, 50/60 HZ
出力レベル(kW): 60 kW
ラック幅: 19" Full rack
高さ(インチ): 6U
出力電圧範囲 (V): Up to 1000 V
通信インターフェース: Ethernet, EtherCAT, Profibus, RS-232/485, EtherNet/IP, and analog
高度な機能: Embedded PowerInsight by Advanced Energy™ IoT intelligence
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