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RF Delivery System eVerest™ and NavX™
Unleash the Power
特徴
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
メリット
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
仕様
| 冷却: | Water |
|---|---|
| 出力周波数（MHz、kHz）: | 1 to 60 MHz |
| 入力電圧 (V): | 208, 400-480 VAC |
| 出力レベル（kW）: | 3.5 to 10 kW |
| ラック幅: | Half and Full rack |
| 高さ（インチ）: | 3U |
| 通信インターフェース: | EtherCAT, Ethernet, RS-232 |
| 高度な機能: | Multi-level Pulsing, arc management, CEX, MBFT |
Featured Resources
eVerest and NavX RF Delivery System
Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries
eVerest Brochure
eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.
NavX Matching Network Brochure
Innovate beyond the nanometer. The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles
Substrate Biasing for Sputter Deposition Processes
Explore the principles and practices of substrate biasing, examining its impact on thin-film characteristics and the various methods used to achieve optimal results.
技術文書
テクニカル・ビデオ
Unleash the Power: NavX™ RF Matching Network
サービス
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
