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Opti™ RF Power Rack
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Efficiency Meets Insight
The Opti RF power rack is a modernized solution for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools. It is designed to enable high efficiency, providing the intelligence needed to monitor health and optimize processes.
Customized solutions for other 200 mm tools are available upon request.
Customized solutions for other 200 mm tools are available upon request.
特徴
- High-performance AE generators with > 70% efficiency at full power
- Real-time HMI dashboard and PowerInsight
- Built-in safety including EMO switch, leak detection, smoke detection, and overcurrent protection
- Optional remote access within secure fab networks
メリット
- Higher process stability and efficiency from advanced RF power delivery
- View live system data and historical data (up to one hour), temperature charts, and time-stamped fault and warning history from each generator
- Significant ROI in operating cost and tool downtime
- Versatile design for easy accessibility and serviceability
仕様
| Rack Size, with casters and lift hooks (H x W x D): |
43.67 in (1109 mm) x 22.56 in (573 mm) x 36.88 in (935.75 mm) |
|---|---|
| RF Generators: |
Two Paramount Plus generators (2 MHz, 5 kW) and one Paramount generator (13.56 MHz, 5 kW) |
| Line Voltage: |
200/208 VAC +/-10% (47 to 63 Hz) |
| AC to RF Efficiency: |
Above 70% efficient at full power |
| EMO: |
Attached to rack with guard |
| Smoke Sensor: |
Smoke/dust detector fed by a small fan. Tied to EMO. |
| Leak Detector: |
Sensor on bottom water catch tray. Tied to EMO. |
| PowerInsight HMI: |
10.1 in adjustable touchscreen tablet |
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技術文書
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