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Opti™ RF Power Rack
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Efficiency Meets Insight
The Opti™ RF power rack is a modernized solution for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools. It is designed to enable high efficiency, providing the intelligence needed to monitor health and optimize processes.
Customized solutions for other 200 mm tools are available upon request.
Customized solutions for other 200 mm tools are available upon request.
特徴
- High-performance AE generators with > 70% efficiency at full power
- Real-time HMI dashboard and PowerInsight
- Built-in safety including EMO switch, leak detection, smoke detection, and overcurrent protection
メリット
- Higher process stability and efficiency from advanced RF power delivery
- View live system data and historical data (up to one hour), temperature charts, and time-stamped fault and warning history from each generator
- Optional remote access within secure fab networks
- Significant ROI in operating cost and tool downtime
- Versatile design for easy accessibility and serviceability
仕様
| RF Generators: |
Two Paramount Plus generators (2 MHz, 5 kW) and one Paramount generator (13.56 MHz, 5 kW) |
|---|---|
| EMO: |
Attached to rack with guard |
| Smoke Sensor: |
Smoke/dust detector fed by a small fan. Tied to EMO. |
| Leak Detector: |
Sensor on bottom water catch tray. Tied to EMO. |
| PowerInsight HMI: |
10.1 in adjustable touchscreen tablet |
| Advanced Features: | Data recording, exporting, and reporting and HMI remote access |
Featured Resources
技術文書
Product Information Documents
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