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MAXstream Remote Plasma Source
Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications
特点
- Five models: MAXstream 300 for low flow applications and MAXstream 600, 800, 1000, 1200 for higher flow applications
- Highly reliable RPS maximizes tool uptime
- Drop-in capability with traditional RPS units for an easy design upgrade path to higher performance and reliability
- Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion
- Active monitoring and control of plasma power for industry-leading power control
益处
- Enable customers to optimize cost via multiple flow options
- Save valuable tool space with a smaller footprint than Xstream RPS
- Achieve virtually 100% ignition reliability with unique AE dual ignition cores
- Increase chamber life with AE proprietary high purity aluminum substrate with Type 3 anodization
- Reduce cleaning time with up to 12 SLPM flow capabilities
规格
| 冷却: | Water |
|---|---|
| 输出频率（兆赫、千赫）: | 400 kHz |
| 输入电压 (V): | 208 VAC |
| 功率等级（千瓦）: | 6 to 12 kW |
| 机架宽度: | N/A, chamber mounted |
| 通信接口: | RS-232, Analog, Ethernet, EtherCAT |
| 流程应用: | Chamber Clean, Reactive Etch, Reactive Deposition |
| 化学兼容性: | Ar, O2, H2, N2, F2, H2O, NF3, CxFy |
技术文档
技术视频
Chamber Cleaning with Advanced Energy Remote Plasma Sources
服务
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
Refurbishments
Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
