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UV 400 & UVR 400 Pyrometers
Digital pyrometers with extremely short wavelength for true Wafer Surface Temperature and Reflectance Instrumentation for GaN-based MOCVD epitaxy processes. Temperature range 650 to 1300 °C.
Designed specifically for GaN-based MOCVD epitaxy processes, the UV 400 and UVR 400 systems offer direct measurement of wafer surface temperature, a marked improvement over the traditional susceptor/pocket temperature measurement, leading to enhanced yield. The UVR 400 goes a step further, incorporating an additional reflectometer at 635 nm, operating at a measurement speed of 0.5 kHz, facilitating the measurement of deposition thickness. These systems redefine the standards for LED production processes, with results showcasing a reliable correlation between process temperature and the final product wavelength.
特点
- Reliable wafer temperature with PL wavelength correlation
- Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar)
- Adjustable subrange within the temperature range
- Minimize noise in measurement using true photocounting instrumentation
- Complete solution for reactor temperature control with PhotriX and concentric lightpipe options
益处
- Improve yield via accurate true wafer temperature measurement
- Measure temperature directly on the GaN layer using UV wavelength instrumentation
- Obtain reliable wafer temperature with PL wavelength correlation
- Capture real-time reflectance measurement using a fast pulsing light source
- Prevent residue temperature oscillation as seen in NIR emissivity-compensated pyrometers
- Prevent data skew due to delayed sampling (no shutter on and off)
规格
| 工作温度范围 (°C): | 650 to 1300 °C |
|---|---|
| 光谱范围（微米）: | 0.383 to 0.410 |
| 测量不确定性（°C）: | From 3 °C |
| 光学器件（毫米）: | Fixed optics |
| 视场角（最小光斑尺寸）（毫米）: | Min 8:1 (9.8) |
| 校准/瞄准: | None |
| 接口/输出（毫安）: | 0/4 to 20 mA |
| 曝光时间 t90（毫秒）: | 8 ms |
配件
Impac Other Electrical
Other Electrical Accessories Compatible With Impac Pyrometers
技术文档
服务
Repair
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Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
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