发表的文章 Dave Christie
Dual Magnetron Sputtering: Delivering High Power*
六月 17, 2015
Current source supplies are ideal for pulsed dual magnetron sputtering (DMS). They have the advantage of little to no current rise when an arc occurs, and they enable arc detection by voltage fall due to high incremental impedance.
Dual Magnetron Sputtering (DMS): The Basics
六月 11, 2014
Magnetron sputtering systems are used to deposit complex layer systems on solid substrates and flexible webs for various uses, including display, flexible electronics, packaging, lighting, decorative, architectural, and automotive applications.
Controlling Pulsed DMS Reactive Sputtering Processes: Getting a Solid Voltage Feedback Signal
四月 22, 2014
Large-area coating is used to deposit complex layer systems on glass for architectural and automotive applications, and a myriad of others, including coatings on flexible webs.
Success is in the Details: Not-So-Obvious Subtleties of Voltage Control
四月 08, 2014
The possibility of controlling reactive sputtering processes in the transition region has been intriguing and compelling for as long as I have been in the thin-films industry (actually, since before I joined the industry in 1995).