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Luxtron® M-1200 Fiber Optic Temperature Converter

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High-accuracy temperature measurement in a compact design

Smaller, more accurate, and with a broader measurement range (-200 to 450°C ) than many other contact temperature sensing devices, the Luxtron M-1200 expands process development possibilities. Its ultra-fast EtherCAT(R) communication, low-noise electronics, flexible probe configurations, and compact form factor streamline integration into complex semiconductor tools.
 

特点

  • Wide supported temperature range (-200 to 450°C )
  • Low noise level with fast response rate
  • Five channels in a single converter
  • EtherCAT communications
  • DIN rail mounting

益处

  • Contact measurement to minimize the thermal offset
  • Reduced form factor for easy installation and integration
  • High accuracy and extreme temperature control for a variety of etch and wafer fab processes
  • Support from experienced applications engineers to customize probes for OEMs

规格

工作温度范围 (°C): 0 to 60
通道数: Up to 5
准确性: ± 0.15 °C
噪音(°C): 0.1 °C
测量范围: -200 to 450
通信接口: EtherCAT
读出速度(赫兹): 2 to 50
传感器数量: Up to 5

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