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Paramount Plus RF Generator
Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
特点
- Enhanced RF stability with tightly regulated power output
- Advanced multi-level pulsing
- Pulse synchronization and monitoring
- Real-time power and impedance measurement
- Advanced FastDAQ data acquisition system
益处
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
规格
| 冷却: | Hybrid (air and water) |
|---|---|
| 输出频率（兆赫、千赫）: | 1 to 60 MHz |
| 输入电压 (V): | 208 VAC |
| 功率等级（千瓦）: | 5 to 15 kW |
| 机架宽度: | Full rack |
| 高度（英寸）: | 3U, 4U |
| 通信接口: | RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT |
| 高级功能: | Pulsing, arc management, CEX, MBFT |
Featured Resources
技术文档
服务
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
Conversion
Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
