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数据手册

Xstream RPS Data Sheet

Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.

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白皮书

Advanced Ignition RPS White Paper

This paper describes Xstream, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations.

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信息图

3 Tips for Sourcing Chamber Cleaning RPS Systems

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数字资产

Semiconductor Manufacturing: How We Power the Process

Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.

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白皮书

RPS Chamber Cleaning System Impact on Cost of Ownership White Paper

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白皮书

RPS Chamber Anodization White Paper

Our Xstream platform virtually eliminates the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.

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谢谢

您现在可以查看 Advanced Energy 网站上的任何资源。点击下面的按钮即可查看您要求的资源。