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Apex RF Generator
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High-Power Density for Compact Installation
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
特点
- High power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
益处
- Readily integrate process tools with enhanced flexibility
- Stabilize plasma operation
- Improve yield for fast arc management
- Easily customize and configure to your process requirements
规格
| 冷却: | water |
|---|---|
| 输出频率（兆赫、千赫）: | 13.56 MHz |
| 输入电压 (V): | 208 VAC |
| 功率等级（千瓦）: | 1.5 to 10 kW |
| 机架宽度: | 1/2 rack and full rack |
| 高度（英寸）: | 3U |
| 通信接口: | RS-232, Analog, ethernet, DeviceNet |
| 高级功能: | Pulsing, CEX |
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服务
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PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
