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Omni™ RF Diagnostic Cart
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Calibrate with Accuracy, Optimize with Confidence.
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.
特点
- One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
- Power accuracy of ±0.5% + 0.5 W across power range
- Frequency range band of 0.2 to 200 MHz, 5 kW
- Automatic or manual modes of measurement
- Metadata tagging and data storage capability for long term monitoring
- Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
- Dashboards and alerts for visualization and predictive analytics
- Data export to CSV file
- Mobile cart with four locking swivel casters
益处
- Optimize RF power delivery for critical semiconductor processes
- Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
- Yearly calibration of the sensor – ease of maintenance and lower operating costs
- Agnostic – measures RF power from non-AE power products
- Accessibility to sensor for ease of calibration and servicing
- Unique data collection features to track trends and reduce equipment downtime and operational costs
- Mobile design for easy navigation within fabs
- Customizations provided upon request
规格
| Cart Dimensions (L x W x H): |
48in. (51in. to handle) x 18.2in. x 35.6in. (41.1in. display raised) |
|---|---|
| Cart Input Voltage: |
100/230 VAC, +/-10%, 50/60 Hz |
| Cart Communications: |
USB-A, RJ-45, X5 RJ-45, USB-C, HDMI |
| RF power sensor frequency range: |
0.2 to 200 MHz |
| RF power sensor accuracy: |
+/- (0.5% of Rdg + 0.5 W) at the calibrated frequencies and power ranges |
| 50-ohm Load Power: |
10 kW |
| 50-ohm Load Cooling: |
Oil and air cooling with fans |
| PowerInsight HMI: |
10.1in. adjustable touchscreen tablet |
Frequently Asked Questions
What is included in the standard Omni Cart package?
What frequencies are supported?
What is the lead time for delivery?
What is the warranty period?
Is the cart mobile and easy to maneuver?
What are the electrical specifications?
Is there a 10-kW sensor option available?
Is the cart compatible with non-AE RF generators?
How does the Omni Cart improve semiconductor process control?
What is the sampling rate in manual mode?
Can the Omni Cart tell me my recommended setpoint?
How is the setpoint value calculated?
How is data exported and stored?
Can I connect a laptop and generator simultaneously?
What security measures are in place for demos?
What security and safety measures are in place on the cart?
Are there training resources available?
How does the Omni Cart help reduce operational costs?
Can the Omni Cart reduce time spent on preventive maintenance?
Does the Omni Cart help with compliance or audits?
Featured Resources
技术文档
Product Information Documents
技术视频
Omni™ RF Diagnostic Cart
4月 30, 2025
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. In this video, we highlight the performance capabilities and measurement modes for verifying delivered power from RF generators. The Omni RF diagnostic cart provides accurate RF calibration and diagnostics by combining Advanced Energy's 5540A RF Power Meter with PowerInsight by Advanced Energy® IoT enabled data ecosystem into a single, user-friendly cart. With this calibration cart, calibrate with accuracy and optimize with confidence for your RF generator calibration needs.
View the full product details here: www.advancedenergy.com/en-us/products/plasma-power-products/integrated-systems/omni-rf-diagnostic-cart/.
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