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Integrated Systems

Advanced Energy's integrated systems seamlessly combine various AE products into comprehensive solutions tailored to meet the specific needs of our customers. These solutions ensure consistent quality and performance, enhancing the efficiency and effectiveness of plasma processes across different industries.

Integrated Systems

Omni™ RF Diagnostic Cart

The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes.

Opti™ RF Power Rack

Optimized power delivery for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools.

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Omni™ RF Diagnostic Cart

The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes.

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技术文档

Product Information Documents New Updated

Omni RF Diagnostic Cart Brochure

手册 PDF 5 MB 2月19日, 2025

Omni RF Diagnostic Cart Flyer

手册 PDF 3 MB 2月13日, 2025

Opti RF Power Rack Brochure New

手册 PDF 1 MB 9月15日, 2025

Opti RF Power Rack Flyer New

手册 PDF 31 MB 9月15日, 2025

PowerInsight by Advanced Energy Updated

PowerInsight acts as a flight recorder, capturing AE power delivery system performance data. Download PowerInsight brochure to see how AE's IoT solutions meet your needs.

手册 PDF 4 MB 10月2日, 2025

Gemini 5540A Datasheet

数据表 PDF 490 KB 4月27日, 2025

Paramount Plus Data Sheet

数据表 PDF 5 MB 6月15日, 2023

Paramount Series Data Sheet

Paramount HF RF Power Delivery Systems offer precise RF control to enable rapid plasma changes, while its flexible digital architecture, wide output coverage, and comprehensive feature set facilitate process customization. Download Paramount HF Brochure to discover how the RF Power Delivery Systems meet your needs.

数据表 PDF 4 MB 2月24日, 2025