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Cesar
ActiveUnparalleled Breadth of RF-Application Delivery without Custom Lead Times
The proven Cesar® platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs. Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high-quality components, Cesar RF generators maximize reliability and productivity.
特点
- Compact, streamlined design and standard platform packaging for easy replacement
- High efficiency — less heat generated
- RS-232, Ethernet, and Profibus communication
- Active front panel with convenient, comprehensive operating menu
- CEX (phase synch) operation mode
益处
- Increase process uptime thanks to highly reliable design and quality components
- Customize performance without custom-unit lead times
- Enhance operational ease and flexibility
规格
| 冷却: | Air or water |
|---|---|
| 输出频率（兆赫、千赫）: | 2 to 40 MHz |
| 输入电压 (V): | 200 and 400 VAC |
| 功率等级（千瓦）: | 0.3 to 5 kW |
| 机架宽度: | Full rack |
| 高度（英寸）: | 2U, 3U |
| 通信接口: | Analog, RS-232, Ethernet, Profibus |
| 高级功能: | Active Front Planel, CEX |
技术文档
比较
| Model | Cesar | Paramount | Paramount Plus |
|---|---|---|---|
| 输入电压 (V) | 200 and 400 VAC | 208, 400, 480 VAC | 208 VAC |
| 功率等级（千瓦） | 0.3 to 5 kW | 3 to 15 kW | 5 to 15 kW |
| 通信接口 | Analog, RS-232, Ethernet, Profibus | EtherCAT, Ethernet, DeviceNet, RS-232 | RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT |
| 高级功能 | Active Front Planel, CEX | Pulsing, CEX, arc management, MBFT | Pulsing, arc management, CEX, MBFT |
| 流程应用 | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
服务
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Conversion
Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase
Refurbishments
Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Retrofit
Replace existing, aged, discontinued, or unrepairable devices of any make and model with a new, drop-in solution, which is transparent from a specification and operation standpoint.
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
Used Equipment
We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.
