Temperature Measurement

UV 400 and UVR 400

True Wafer Surface Temperature and Reflectance Measurement Instrumentation for GaN-based Epitaxy

Advanced Energy's UV 400 and UVR 400 provide direct measurement of the wafer surface temperature instead of the traditional susceptor/pocket temperature.

  • Wide temperature range (650 to 1300°C) to allow coverage of both main buffer growth and MQW growth
  • Measure deposition thickness with the additional reflectometer at 635 nm on the UVR 400
  • Adjustable emissivity, transmittance, and sub range
  • Overview
  • Technical Specs
  • Documents
  • Service & Support

Overview

Advanced Energy's UV 400 and UVR 400 provide a direct measurement of the wafer surface temperature instead of the traditional susceptor/pocket temperature. This improved measurement allows more accurate control of the wafer temperature leading to improved yield.

The UVR 400 includes an additional reflectometer at 635 nm with 0.5 kHz measurement speed. This enables measurement of deposition thickness.

These systems are now setting a new standard for LED production processes with results showing a reliable correlation between process temperature and final product wavelength.

Benefits

  • Improve yield through accurate true wafer temperature measurement
  • Measure temperature directly on the GaN layer using UV wavelength instrumentation
  • Capture real-time reflectance measurement using a fast pulsing light source
  • Prevent residue temperature oscillation as seen in NIR emissivity-compensated pyrometers
  • Prevent data skew due to delayed sampling (no shutter on and off)

Features

  • Reliable wafer temperature with PL wavelength correlation
  • Available with two interface types: Analog output and RS485 with UPP protocol
  • Adjustable sub range within temperature range
  • Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar)
  • Complete solution for reactor temperature control with PhotriX and concentric lightpipe options
  • Measurement Specifications

    Temperature Range:

    650 to 1300°C

    Any range adjustable within the temperature range, minimum span 51°C

    Spectral Ranges:

    383 to 410 nm (10% of values)

    Measurement Uncertainty:

    at ε = 1, t90 = 1 s, Thous. = 28°C

    < 1000°C: 3°C
    > 1000°C: 0.3% oR

    The pyrometer must be in operation for 30 minutes before these values are valid.

    Repeatability:

    at ε = 1, t90 = 1 s, Thous. = 28°C

    0.1% oR + 0.1°C

    Resolution:

    0.1°C at interface
    < 0.025% of the set partial measurement range at the analog output (12 bits)

    Exposure time t90:

    Integration Time: Min of 8 ms

    Emissivity ε:

    0.100 to 1.000 in steps of 1/1000

    Transmittance τ:

    0.100 to 1.000 in steps of 1/1000

    Maximum Value Storage:

    Built-in single or double storage.
    Clearing with adjusted time tclear (off; 0.01 s; 0.05 s; 0.25 s; 1 s; 5 s; 25 s), via interface

  • Optical Specifications

    Optics:

    Fixed optics

    Distance Ratio (FOV):

    min 8:1 (9.8 mm)

  • Interface and Communication

    Connection:

    M12 (8-pin) plug connector for the power supply, RS485 and analog output of the measurement temperature

    M12 (4-pin) plug connector for the analog output of reflectance measurement

    Parameters:

    Adjustable via interface:
    Emissivity ε, Transmittance τ, setting time t90, delete time tcl, 0 to 20 or 4 to 20 mA analog output (switchable), sub range
    RS485: address, baud rate, wait time tW

    Readable via interface:
    Internal detector temperature in 0.1°C

    Analog Output:

    0 to 20 mA or 4 to 20 mA, linear (via digital interface)

    Digital Interface:

    RS485 addressable (half-duplex)
    Baud rate: 1200 to 38400

  • Environmental Specifications

    Protection Class:

    IP 40 IEC 60529

    Vacuum and Gas Conditions:

    Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar). Housing has air opening

    Operating Position:

    Any

    Ambient Temperature:

    10 to 38°C on the housing

    Storage Temperature:

    -20 to 50°C

    Relative Humidity:

    Non-condensating conditions

    Weight:

    2.5 kg (instrument without adapter)

    Housing:

    Black anodized aluminum

    CE Label:

    According to EU directives about electromagnetical immunity

    Any further specifications see data sheet

  • Electrical

    Power Consumption:

    Max 5 W

    Load:

    0 to 500 Ω

    Isolation:

    Power supply, analog output, and digital interface are electrically isolated from each other

  • Typical Applications

    True Wafer Surface Temperature Measurements

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

Learn More

Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

Learn More

Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

Learn More

Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.