Search results for "Remote Plasma Sources"

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Resources

Rapid OX RPS Data Sheet

Rapid OX is the ideal remote plasma source for oxygen-based processes.

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Resources

Litmas RPS Data Sheet

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases.

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Resources

Retrofit: Rapid F to Xstream

Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.

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Resources

MAXStream 600, 800, 1000, and 1200 Data Sheet

The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.

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Products

Calibration Sources

We offer unique and very precise Mikron calibration sources. Our blackbodies feature cutting-edge emissivity values, homogenous emission areas, and various different-sized apertures. And fast-heat up times and high temperature stability are guaranteed.

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Resources

Remote Sensing Application Note

An insight into the different options available for remote sensing the positives and negatives associated to each approach.

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Resources

Calibration Sources Overview

The quality of our calibration sources is guaranteed by tests, burn-in times, and pyrometric calibrations.

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Accessories

Innova BZ7007 Remote & Offline Software

BZ7007 Software is used during set-up and to retrieve data from a stand alone system where the gas monitor is used as the system controller

Resources

Standard HV Rack Remote-Control Interface Connections

View remote-control interface connections for the configurable HV Rack series.

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Pages

Semiconductor Manufacturing Diagram

Our recently expanded semiconductor portfolio offers new power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and thin film deposition.

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.