Search results for "Remote Plasma Sources"

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Quanta RPS Data Sheet

The Quanta remote plasma source (RPS) enables sophisticated plasma generation and expansion into new thin-film processes not possible with traditional RPS or in-situ plasma generation.

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RPS Measurement Simulation White Paper

This paper describes a new remote source technology using capacitively coupled, VHF energy to produce a flexible and unique remote plasma generator

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Self-Contained Plasma Source White Paper

This paper introduces a new remote source technology developed to provide high density plasma generation across a broad range of process conditions.

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Calibration Sources

We offer unique and very precise Mikron calibration sources. Our blackbodies feature cutting-edge emissivity values, homogenous emission areas, and various different-sized apertures. And fast-heat up times and high temperature stability are guaranteed.

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Retrofit: Rapid F to Xstream

Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.

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Calibration Sources Overview

The quality of our calibration sources is guaranteed by tests, burn-in times, and pyrometric calibrations.

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Remote Sensing Application Note

An insight into the different options available for remote sensing the positives and negatives associated to each approach.

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Standard HV Rack Remote-Control Interface Connections

View remote-control interface connections for the configurable HV Rack series.

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Mikron M390

Ultra-fast Blackbody Calibration Sources, 300 to 3000°C

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BZ7007 Remote and Offline Software Manaul

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.