Search results for "Remote Plasma Sources"

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Resources

Xstream RPS Data Sheet

Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.

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Resources

Litmas RPS Data Sheet

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases.

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Resources

Rapid OX RPS Data Sheet

Rapid OX is the ideal remote plasma source for oxygen-based processes.

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Resources

MAXStream 600, 800, 1000, and 1200 Data Sheet

The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.

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Resources

Retrofit: Rapid F to Xstream

Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.

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Products

Calibration Sources

We offer unique and very precise Mikron calibration sources. Our blackbodies feature cutting-edge emissivity values, homogenous emission areas, and various different-sized apertures. And fast-heat up times and high temperature stability are guaranteed.

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Products

远程等离子体源

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Calibration Sources Overview

The quality of our calibration sources is guaranteed by tests, burn-in times, and pyrometric calibrations.

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Resources

Remote Sensing Application Note

An insight into the different options available for remote sensing the positives and negatives associated to each approach.

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Resources

Standard HV Rack Remote-Control Interface Connections

View remote-control interface connections for the configurable HV Rack series.

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Thank You

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.