Temperature Measurement Products

UV 400 and UVR 400

True Wafer Surface Temperature and Reflectance Measurement for GaN-based Epitaxy, 650 to 1300°C

Advanced Energy's UV 400 and UVR 400 pyrometers directly measure wafer surface temperature instead of the traditional susceptor/pocket temperature.

  • Wide temperature range (650 to 1300°C) allows coverage of both main buffer growth and MQW growth
  • Measure deposition thickness with the additional reflectometer at 635 nm on the UVR 400
  • Adjustable emissivity, transmittance, and subrange
  • Overview
  • Technical Specs
  • Documents
  • Service & Support

Overview

Advanced Energy's UV 400 and UVR 400 pyrometers directly measure wafer surface temperature. This improved method allows more accurate control of the wafer temperature leading to improved yield.

The UVR 400 includes an additional reflectometer at 635 nm with 0.5 kHz measurement speed. This enables you to enable measure deposition thickness.

These systems set a new standard for LED production processes. Results show a reliable correlation between process temperature and final product wavelength.

Benefits

  • Improve yield via accurate true wafer temperature measurement
  • Measure temperature directly on the GaN layer using UV wavelength instrumentation
  • Capture real-time reflectance measurement using a fast pulsing light source
  • Prevent residue temperature oscillation as seen in NIR emissivity-compensated pyrometers
  • Prevent data skew due to delayed sampling (no shutter on and off)

Features

  • Reliable wafer temperature with PL wavelength correlation
  • Analog output and RS485 with UPP protocol interfaces available
  • Adjustable subrange within the temperature range
  • Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar)
  • Complete solution for reactor temperature control with PhotriX and concentric lightpipe options

Select specifications are shown below. Please see product data sheet for additional specifications.

  • Temperature Range

    UV 400 and UVR 400

    650 to 1300°C
    Any range adjustable within the temperature range, minimum span 51°C

  • Measurement

    Spectral Ranges

    383 to 410 nm (10% of values)

    Measurement Uncertainty

    < 1000°C: 3°C
    > 1000°C: 0.3% of reading
    at ε = 1, t90 = 1 s, Thous. = 28°C
    The pyrometer must be in operation for 30 minutes before these values are valid.

    Repeatability

    0.1% oR + 0.1°C
    at ε = 1, t90 = 1 s, Thous. = 28°C

    Exposure Time t90

    Integration Time: Min of 8 ms

    Emissivity ε

    0.100 to 1.000 in steps of 1/1000

    Transmittance τ

    0.100 to 1.000 in steps of 1/1000

  • Optical

    Optics

    Fixed optics

    Distance Ratio (FOV)

    Minimum 8:1 (9.8 mm)

  • Interface and Communication

    Connection

    M12 (8-pin) plug connector for the power supply, RS485 and analog output of the measurement temperature
    M12 (4-pin) plug connector for the analog output of reflectance measurement

    Parameters

    Adjustable via interface: Emissivity ε, Transmittance τ, setting time t90, delete time tcl, 0 to 20 or 4 to 20 mA analog output (switchable), sub range RS485: address, baud rate, wait time tW

    Readable via interface: Internal detector temperature in 0.1°C

    Analog Output

    0 to 20 mA or 4 to 20 mA, linear (via digital interface)

    Digital Interface

    RS485 addressable (half-duplex)
    Baud rate: 1200 to 38400

  • Environmental

    Protection Class

    IP 40 IEC 60529

    Vacuum and Gas Conditions

    Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar). Housing has air opening

    Operating Position

    Any

    Ambient Temperature

    10 to 38°C on the housing

    Storage Temperature

    -20 to 50°C

    Relative Humidity

    Non-condensing conditions

    Weight

    2.5 kg (instrument without adapter)

    Housing

    Black anodized aluminum

    CE Label

    According to EU directives about electromagnetical immunity

  • Electrical

    Power Consumption:

    Max 5 W

    Load:

    0 to 500 Ω

    Isolation:

    Power supply, analog output, and digital interface are electrically isolated from each other

  • Typical Applications

    • True Wafer Surface Temperature Measurements

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


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Other Technical Support

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