Remote Plasma Sources

Quanta RPS

VHF Remote Plasma Source with Advanced Functionality for Demanding Thin Film Applications

For ultimate control of process parameters, the VHF RPS lets you customize the radical mix in the plasma. Benefit from a vast ignition and operating ranges, and a high density of reactives.

  • Capable of very fine tuning of plasma parameters
  • Real-time monitoring of the plasma voltage, current, and impedance
  • Fast solid-state match and frequency tuning ensures stable and repeatable plasma output
  • Overview
  • Technical Specs
  • Service & Support

Overview

Combining VHF energy and CCP architecture, the Quanta® remote plasma source (RPS) enables sophisticated plasma generation and expansion into new thin-film processes not possible with traditional RPS or in-situ plasma generation. Capable of generating very low energy plasma, Quanta RPS enables damage-free processing of smaller geometries for next-generation chip creation. Quanta is capable of igniting in-process gases, eliminating the need for argon and removing the effect of the ignition process on the wafer. With an extremely wide ignition and operating range, Quanta has capabilities that vastly outperform other RPS units.

Benefits

  • Extremely wide ignition and operating range
  • Ignites in-process gas; no need for ignition step
  • Capable of extremely low power plasma processes
  • Proven VHF power-delivery technology
  • Real-time process parameter reporting: Impedance, voltage, power

Features

  • Enhanced ignition of in-process gas; wide range of flow and pressure
  • Integrated solid-state impedance matching and frequency tuning
  • Virtual Front Panel allows user control and monitoring of operational features and parameters
  • High-purity Al2O3 ceramics on all plasma-wetted surfaces
  • Pulsing capable
  • Ignition†

    Quanta 3k

    NF3, CF4, CHF3: Up to 0.5 Torr*

    Oxygen: Up to 2.5 Torr*

    Hydrogen: Up to 5 Torr*

    *no Argon needed

    Quanta 6k

    NF3, CF4, CHF3: Up to 0.5 Torr*

    Oxygen: Up to 5 Torr*

    Hydrogen: Up to 10 Torr*

    *no Argon needed

    Minimum ignition and operating pressure ~1 mTorr

  • Operation†

    Quanta 3k

    NF3: Up to 2 slm/6 Torr

    Oxygen: Up to 10 slm/20 Torr

    Hydrogen: Up to 10 slm/20Torr

    Quanta 6k

    NF3: Up to 2 slm/6 Torr

    Oxygen: Up to 10 slm/20 Torr

    Hydrogen: Up to 10 slm/20Torr

    Minimum ignition and operating pressure ~1 mTorr

  • Pulsing

    Quanta 3k

    Frequency: 2 Hz to 10 kHz

    Duty Cycle: 1% to 99%

    Quanta 6k

    Frequency: 2 Hz to 10 kHz

    Duty Cycle: 1% to 99%

  • Chamber

    Quanta 3k

    High purity alumina ~ 5 mm

    Quanta 6k

    High purity alumina ~5 mm

  • O-rings

    Quanta 3k

    Kalrez®

    Quanta 6k

    Kalrez®

  • Input Power

    Quanta 3k

    180 to 229 VAC, 50/60 Hz, 30A 3 ϕ

    Quanta 6k

    180 to 229 VAC, 50/60 Hz, 50A 3 ϕ

  • Water

    Quanta 3k

    5.7 liters/min, <30 C

    Quanta 6k

    5.7 liters/min, <30 C

  • Ambient

    Quanta 3k

    40 C max

    Quanta 6k

    40 C max

  • Interfaces

    Quanta 3k

    Analog, serial

    Quanta 6k

    Analog, serial

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

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