Plasma Power Generators

Paramount Plus

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Paramount Plus offers progressive technology and customizable features that include premier pulsing control.

  • Precise RF and pulse control
  • Fast response to plasma changes
  • Built-in diagnostic tools
  • Overview
  • Technical Specs
  • Service & Support

Overview

Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.

Benefits

  • Precisely control RF
  • Enhance plasma stability
  • Expedite plasma transitions
  • Reduce process times
  • Improve process repeatability and chamber matching

Features

  • Enhanced RF stability with tightly regulated power output
  • Advanced multi-level pulsing
  • Pulse synchronization and monitoring
  • Real-time power and impedance measurement
  • Advanced FastDAQ data acquisition system
  • Power Level

    Paramount Plus MF

    5 and 15 kW

    Paramount Plus VHF

    3 and 6 kW

  • Frequencies

    Paramount Plus MF

    2 MHz, frequency tuning ± 10%

    Paramount Plus VHF

    27 MHz, 40 MHz, 60 MHz, frequency tuning ± 5%

  • Available Interfaces

    RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT

  • AC Input

    Paramount Plus MF

    200/240 VAC, 400/480 VAC

    Paramount Plus VHF

    200/240 VAC, 400/480 VAC

  • Line Frequency

    50/60 Hz

  • Cooling

    Air and water

  • Operating Ambient Temperature Range

    +5°C to +40°C, +41°F to +104°F

  • Advanced Features

    Multi-level pulsing, arc management, CEX

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.