Plasma Power Generators


Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs.

  • Customized performance without custom lead times
  • Reliable design for maximum uptime
  • Powerful user interface for easy operation
  • Overview
  • Technical Specs
  • Documents
  • Service & Support


The proven Cesar® platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.

Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high-quality components, Cesar RF generators maximize reliability and productivity.


  • Increase process uptime thanks to highly reliable design and quality components
  • Customize performance without custom-unit lead times
  • Enhance operational ease and flexibility


  • Compact, streamlined design and standard platform packaging for easy replacement
  • High efficiency — less heat generated
  • RS-232, Ethernet, and Profibus communication
  • Active front panel with convenient, comprehensive operating menu
  • CEX (phase synch) operation mode
  • Power Level

    Cesar MF

    600 W, 1 kW, 2 kW, 2.5 kW, 3 kW, 5 kW

    Cesar HF

    300 W, 600 W, 1 kW, 1.2 kW, 2 kW, 2.5 kW, 3 kW, 5 kW

    Cesar VHF

    300 W, 500 W, 600 W, 1 kW, 2 kW, 4 kW

  • Frequencies

    Cesar MF

    2 MHz, 4 MHz

    Cesar HF

    13 MHz

    Cesar VHF

    27 MHz, 40 MHz

  • Available Interfaces

    Analog, RS-232, Ethernet, Profibus, Active Front Panel

  • AC Input

    208 and 400 VAC

  • Line Frequency

    50/60 Hz

  • Cooling

    Air or water

  • Cooling Water Temperature

    20 to 30°C (68 to 86°F)

  • Advanced Features

    High Efficiency, Active Front Panel, CEX

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546

Thin Film Support
Thermal Product Support
Other Technical Support

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