Plasma Power Generators

Cesar

Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs.

  • Customized performance without custom lead times
  • Reliable design for maximum uptime
  • Powerful user interface for easy operation
  • Overview
  • Technical Specs
  • Service & Support

Overview

The proven Cesar platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.

Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high quality components, Cesar RF generators maximize reliability and productivity.

Benefits

  • Increase process uptime thanks to highly reliable design and quality components
  • Customize performance without custom-unit lead times
  • Enhance operational ease and flexibility

Features

  • Compact, streamlined design and standard platform packaging for easy replacement
  • High efficiency — less heat generated
  • RS-232, Ethernet, and Profibus communication
  • Active front panel with convenient, comprehensive operating menu
  • CEX (phase synch) operation mode
  • Power Level

    Cesar MF

    600 W, 1 kW, 2 kW, 2.5 kW, 3 kW, 5 kW

    Cesar HF

    300 W, 600 W, 1 kW, 1.2 kW, 2 kW, 2.5 kW, 3 kW, 5 kW

    Cesar VHF

    300 W, 500 W, 600 W, 1 kW, 2 kW, 4 kW

  • Frequencies

    Cesar MF

    2 MHz, 4 MHz

    Cesar HF

    13 MHz

    Cesar VHF

    27 MHz, 40 MHz

  • Available Interfaces

    Analog, RS-232, Ethernet, Profibus, Active Front Panel

  • AC Input

    208 and 400 VAC

  • Line Frequency

    50/60 Hz

  • Cooling

    Air or water

  • Cooling Water Temperature

    20 to 30°C (68 to 86°F)

  • Advanced Features

    High Efficiency, Active Front Panel, CEX

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

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