Plasma Power Generators
ALTA
Industry Leading RF Power Solutions for Industrial Applications
The ALTA series comprises 13.56 MHz rack-mounted power supplies and a 13.56 MHz digital tapped matching network.
- Available with power levels from 1.5 kW to 6 kW
- Precise RF control with dynamic response to plasma changes
- Optimized for industrial processes
- Overview
- Technical Specs
- Service & Support
Overview
As manufacturing technologies evolve and rapid plasma transitions become the norm, the highly adaptable ALTA™ platform facilitates advanced process development. It combines accurate, repeatable power delivery with an inherently flexible digital architecture, wide output coverage, and a comprehensive feature set design for robust and reliable operation in any manufacturing or research environment.
Benefits
- Enhanced plasma stability and process repeatability
- Precise RF control
- Fast response to plasma changes
- Flexibility and adaptability to meet specific application needs
Features
- Frequency tuning
- Real-time power and impedance measurement
- Tightly regulated output power
- Arc management
- Models ranging from 1.5 to 6 kW, 13.56 MHz
- Phase synchronization (CEX)
- Easy mounting and handling
-
RF Power
1.5 kW, 3 kW, 6 kW options
-
Frequency
13.56 MHz
-
Power Accuracy into 50Ω
±1 W or ±1% of set point, whichever is greater.
Into 3:1 VSWR: ±1 W or ±2% of set point, whichever is greater. -
Available Serial Interfaces
RS-232, Ethernet, DeviceNet®, Profibus, Profinet, EtherCAT®
-
Input Power
200, 400, 480 VAC options
-
Cooling
Air & Water
-
Digital Tapped Matching Network*
Power Ranges: 3 kW and 5 kW
Input Frequency: 13.56
RF Input Options: HN and 7-16
Available Tapped Coil Configurations: 8-tapped, One open
*For additional specifications, refer to the data sheet.
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support