Plasma Power Generators


Industry Leading RF Power Solutions for Industrial Applications

The ALTA series comprises 13.56 MHz rack-mounted power supplies and a 13.56 MHz digital tapped matching network.

  • Available with power levels from 1.5 kW to 6 kW
  • Precise RF control with dynamic response to plasma changes
  • Optimized for industrial processes
  • Overview
  • Technical Specs
  • Documents
  • Service & Support


As manufacturing technologies evolve and rapid plasma transitions become the norm, the highly adaptable ALTA™ platform facilitates advanced process development. It combines accurate, repeatable power delivery with an inherently flexible digital architecture, wide output coverage, and a comprehensive feature set design for robust and reliable operation in any manufacturing or research environment.


  • Enhanced plasma stability and process repeatability
  • Precise RF control
  • Fast response to plasma changes
  • Flexibility and adaptability to meet specific application needs


  • Frequency tuning
  • Real-time power and impedance measurement
  • Tightly regulated output power
  • Arc management
  • Models ranging from 1.5 to 6 kW, 13.56 MHz
  • Phase synchronization (CEX)
  • Easy mounting and handling
  • RF Power

    1.5 kW, 3 kW, 6 kW options

  • Frequency

    13.56 MHz

  • Power Accuracy into 50Ω

    ±1 W or ±1% of set point, whichever is greater.
    Into 3:1 VSWR: ±1 W or ±2% of set point, whichever is greater.

  • Available Serial Interfaces

    RS-232, Ethernet, DeviceNet®, Profibus, Profinet, EtherCAT®

  • Input Power

    400 to 480 VAC, 60 Hz

  • Cooling

    Air & Water

  • Digital Tapped Matching Network*

    Power Ranges: 3 kW and 5 kW

    Input Frequency: 13.56

    RF Input Options: HN and 7-16

    Available Tapped Coil Configurations: 8-tapped, One open

    *For additional specifications, refer to the data sheet.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546

Thin Film Support
Thermal Product Support
Other Technical Support

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