Plasma Power Generators
Stable, Low-Frequency Sinusoidal Power Designed for Large Substrate Applications Requiring Precise, Reliable Power Delivery
With breakthrough stability, accuracy, and reliability, Crystal innovation powered large area dual-magnetron applications into the high-tech era.
- Single box solution
- Robust communications (Analog, Profibus, RS-232, 422, 485)
- Water and air cooling combined
- Technical Specs
- Tech Docs
- Service & Support
Precise power control is essential for high-density, uniform, reactively sputtered films. The Crystal power supply offers process engineers and operators quick yet stable power, fast arc detection, and low arc energy, resulting in industry-leading repeatability, higher throughput, and better yield. With power granularity from 60 to 180 kW, Crystal power supplies can match the demands of your low-e coating applications. Exceptional stability, flexibility, and fast arc handling and recovery have made Crystal a go-to unit.
- Optimized process stability and yield
- Advanced arc management
- Reduced cost of ownership through lower consumable costs
- Easy, simple setup
- World-class service, support, and training
- 60, 100, 120, 150, and 180 kW models
- Fast arc detection and response (microsecond scale)
- Wide output impedance range
- Suitable for all processes (ZnO, SnO2, TiO2, AI203, Si3N4, Si, SiO2)
- Single-box solution — no hardware or setting adjustments required when changing sputtering materials
100 kW, 120 kW, 150 kW, and 180 kW available
40 to 100 kHz (power dependent)
Power, voltage, or current
Analog, Profibus, RS-232, 422, 485
400 VAC +/- 10% (480 VAC +/- 10% available)
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.