High Voltage Products
Trek 645
Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV
Advanced Energy’s Trek 645 software-driven electrostatic chuck supply offers versatility and performance for use in multiple processes.
- Output Phasing: 0 to ±2 kV
- Output Voltage Range: 0 to ±2 kV
- Output Current Range: 0 to ±6.5 mADC with a peak capability of 10 mA
- Overview
- Technical Specs
- Documents
- Accessories
- Service & Support
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Overview
The Trek® 645 software-driven electrostatic chuck supply with a documented history increases efficiency and throughput equal to three times that of other supplies. The versatile trusted performance of the Trek 645 allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.
Benefits
- Reduce backside gas errors, increases throughput, and eliminate sticky/popping wafer issues
- Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
- Adjust in-process amplitude/offset and output-control versatility
- Control output using the back panel I/O, serial computer command, or front panel controls
- Configure for custom clamp and declamp sequences and wave shapes
Features
- Lockable front panel control interface
- NIST-traceable calibration certificate provided with each unit
- Supports both Coulombic and Johnsen-Rahbek ESC technologies
- Upload and store electrostatic chuck profiles to the unit and stored internally via a user-friendly software interface
- Wafer detection includes no-wafer, wafer-present or wafer-clamped status
Select specifications are shown below. Please see product data sheet for additional specifications.
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Outputs
Output Phasing
Output Voltage A (reference phase): 0 to ±2 kV
Output Voltage B: 0 to ±2 kV (phase B =[-1] x phase A)Output Voltage Range
0 to ±2 kV DC, maximum
Output Current
0 to ±6.5 mA DC with peak capability of 10 mA
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Input
HV Magnitude
External and internal control
Offset Voltage
External or internal control
-
Output Voltage Monitor
Scale Factor
Scale Factor 1 V/200 V
Phase B DC
Accuracy better than 2% of full-scale
Offset Voltage
Less than 10 mV
Output Noise
Less than 50 mV rms*
-
Steady State Voltage Leakage Current Monitor
Scale Factor
1 V / 100 µA
DC Accuracy
±5 µA
Output Noise
Less than 50 mV rms*
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Mechanical
H x W x D
43.7 x 421.6 x 457.3 mm (1.72 x 16.6 x 18 in), 1U rack enclosure
Weight
8.5 lbs (3.86 kg)
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Operating Conditions
Temperature
0 to 35°C (32 to 104°F)
Relative Humidity
To 85%, non-condensing
Altitude
To 2000 meters (6561.68 ft)
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Electrical
DC Input Receptacle
2.0 mm locking DC jack; center contact is
positive and shell is negative (receptacle mates
with Switchcraft S761K plug)Ground Receptacle
Ground stud
Power Requirements
24 VDC, 1.7 A
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Typical Applications
- Electrostatic-driven handling of materials
- Semiconductor wafer processing
- Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Data Sheets
Application Notes
Accessories
Documents & Support
View All Trek 645 AccessoriesGlobal Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
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