High Voltage Power Supplies

G603 Series

60 kV High Voltage Power Supply for SEMs, Direct Write Lithography, X-Ray Nanotube Applications

The G603 high voltage power supplies offer very high stability in E-beam applications.

  • Max Output Power: Accelerator: 6 W, Extractor: 4 W; Suppressor: 0.02 W, Heater: 15 W; Focus: 0.75 W
  • Max Output Voltage: Up to — 60 kV (accelerator)
  • Ripple: < 2 ppm (75 mVpp) (accelerator); Floating Suppressor (-1 kV); Extractor (+10 kV); Filament (3 A) and optional focus (+25 kV)
  • Temperature Coefficient: < 25ppm°C (Accelerator)
  • Control Interface: Digital
  • Overview
  • Technical Specs
  • Service & Support

Overview

Advanced Energy’s G603 series are dependable, flexible, high-stability power supplies that meet the multiple application needs of electron beam applications. With low ripple and high stability, G603 series supplies also feature full digital control and monitoring using fiber-isolated 29-bit CAN.

Benefits

  • Enable better efficiency, more consistent operation, low variance to component change, greater reliability, and easier testing
  • Customize with standard and specialized accessories to simplify installation, configuration, and operation
  • Minimize setup and configuration times with easy-to-use digital control and monitoring

Features

  • Low ripple and high stability for high-resolution systems
  • Customer-defined derivatives available upon request
  • Easy-to-use digital control and monitoring using fiber-isolated 29-bit CAN
  • RoHS compliant to EU directive 2011/65/EU
  • Electrical

    Output Power

    Accelerator:  6 W
    Extractor: 4 W
    Suppressor: 0.02 W
    Heater: 15 W
    Focus: 0.75 W

    Output Voltage

    Accelerator: -60 kV 100 µA
    Extractor: +10 kV 400 µA
    Suppressor: -1 kV 20 µA
    Heater: 5 V 3 A
    Focus: 25 kV 30 µA

    Temperature Coefficient

    Accelerator: < 5 ppm/°C
    Extractor: < 25 ppm/°C
    Suppressor: < 50 ppm/°C
    Focus: < 25 ppm/°C
    Heater: < 200 ppm/°C

    Voltage Ripple

    Accelerator: < 2 ppm (75 mVpp)
    Extractor: < 4 ppm (35 mVpp)
    Suppressor: < 25 ppm (25 mVpp) 
    Heater: < 1 mApp / 5 mVpp with a 1 Ω load
    Focus: < 4 ppm (100 mVpp)

  • Environmental

    Operating Temperature Range

    10 to 45°C (50 to 113°F)

    Storage Temperature Range

    -20 to +70°C (-4 to 158°F)

    Humidity

    80% max RH up to 31°C, reducing linearly to 50% at 40°C (140°F)

  • Mechanical

    Dimensions

    440 x 221.5 x 430 mm3 (17.3 x 8.7 x 17in3) (W x H x D)

    Weight

    35 kg (94 lb)

  • Interface

    Control Interface

    29-bit CAN supplied by fully-isolated fiber optics

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

Compare Products

Model

G603 Series

Classification

60 kV E-Beam power supply

35 kV SEM power supply

Vacuum chamber power supply

Maximum Output Voltage

Accelerator: -60 kV, 100 µA
Extractor: +10 kV, 400 µA
Suppressor: -1 kV, 20 µA
Focus: +25 kV, 30 µA
Heater: +5 V, 3 A

Accelerator: -30 kV, 200 µA (-35 kV for conditioning)
Extractor: +10 kV, 400 µA
Suppressor: -1 kV, 100 µA
Heater: +5 V, 3 A

7 kV

Maximum Output Power

Accelerator: 6 W
Extractor: 4 W
Suppressor: 0.2 W
Focus: 0.75 W
Heater: 15 W

Accelerator: 6 W
Extractor: 4 W
Suppressor: 0.1 W
Heater: 15 W

115 W

Type

Single Output (non-reversing)

Single Output (non-reversing)

Single Output

Ripple (Best Performance)

Accelerator: < 2 ppm (75 mVpp)
Extractor: < 4 ppm (35 mVpp)
Suppressor: < 25 ppm (25 mVpp)
Focus: < 4 ppm (100 mV)
Heater: LF < 1 mApp, HF < 5 mVpp with a 1 Ω load

Accelerator: < 2 ppm (50 mVpp)
Extractor: < 2 ppm (20 mVpp)
Suppressor: < 30 ppm (30 mVpp)
Heater: LF < 1 mA pp, HF < 5 mVpp with a 1 Ω load

< 4286 ppm (< 30 Vpp)

Volume (Smallest Model)

0.042 m3 (1.48 ft3)

0.010 m3 (0.366 ft3)

4964 cm3 (0.175 ft3)

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.