High Voltage Power Supplies

EG353 Series

35 kV High Voltage Power Supply for Scanning Electron Microscopes

This EG353 series meets the demanding multiple-output requirements of SEM, and applications including inspection, material and biological sciences, and forensics.

  • Max Output Power: Accelerator: 6 W; Extractor: 4 W; Suppressor: 0.1 W; Heater: 15 W
  • Max Output Voltage: Up to — 30 kV (Accelerator)
  • Ripple: < 2 ppm (50 mVpp) (Accelerator); Floating Suppressor (-1 kV); Extractor (+10 kV); Filament (3 A)
  • Temperature Coefficient: < 25 ppm°C (Accelerator)
  • Control Interface: Digital
  • Overview
  • Technical Specs
  • Service & Support

Overview

Advanced Energy’s EG353 series offers dependable, high-stability power supplies for scanning electron microscopes (SEM) with built-in flexibility to accommodate various Schottky emission electron gun configurations. The EG353 series includes Advanced Energy’s Direct Drive Digital Control (D3C) which enables a smaller footprint and improves MTBF and reliability. Via a proven design and power-conversion technologies, EG353 power supplies can help maximize image quality and repeatability.

Benefits

  • Enable better efficiency, more consistent operation, low variance-to-component change, greater reliability, and easier testing
  • Easily install with flexible module and rack-mount options
  • Customize with standard and specialized accessories
  • Minimize setup and configuration times with Direct Drive Digital Control (D3C) technology

Features

  • Low ripple (< 1.6 ppm, accelerator) and high stability (< 10 ppm, accelerator) for resolutions to 1 nm
  • Market-leading reliability and performance enabled by Advanced Energy’s Direct Drive Digital Control (D3C) technology
  • Choice of mechanical format — small-footprint module or 19-inch rack-mounted unit
  • Customer-defined derivatives and connection options available upon request
  • Easy-to-use digital control and monitoring; additional grounded outputs can be added
  • Electrical

    Output Power

    Accelerator: 6 W
    Extractor: 4 W
    Suppressor: 0.1 W
    Heater: 15 W

    Output Voltage

    Accelerator: -30 kV 200 µA
    Extractor: +10 kV 400 µA
    Suppressor: -1 kV 100 µA
    Heater: 5 V 3 A

    Voltage Ripple

    Accelerator: < 2 ppm (50 mVpp)
    Extractor: < 2 ppm (20 mVpp)
    Suppressor: < 30 ppm (30 mVpp)
    Heater: < 1 mA pp/5 mVpp with a 1 Ω load

    Temperature Coefficient

    Accelerator: < 25 ppm/°C
    Extractor: < 25 ppm/°C
    Suppressor: < 20 ppm/°C

  • Environmental

    Operating Temperature Range

    10 to 45°C (50 to 113°F)

    Storage Temperature Range

    -20 to +70°C (-4 to 158°F)

    Humidity

    80% max RH up to 31°C, reducing linearly to 50% at 40°C (140°F)

  • Mechanical

    Module Dimensions

    240 x 130 x 332 mm (9.4 x 5.1 x 13 in3) (W x H x D)

    Module Weight

    10.2 kg (22.5 lb)

    Rack-Mount Unit Dimensions

    440 x 132.6 x 345 mm (17.3 x 5.2 x 13.5 in3) (W x H x D)

    Rack-Mount Weight

    12 kg (26.5 lb)

  • Interface

    Input Connector

    2-way PTR/Phoenix STLZ950/2-G-5.08-green (pin 1 positive, pin 2 negative)

    HV Output Connectors

    Heater: 2 wires of customer 4-way HV connector
    Suppressor: 1 wire of customer 4-way HV connector
    Extractor: 1 wire of customer 4-way HV connector

  • Options and Accessories

    Supply Connectors

    • Standard EG353 4-point connector
    • Claymount CA12 connector
    • Installation Type: Compact module
    • 19”-rack-mount unit

    Accessories

    HV Output Cables with EG353 connectors and SEM column connectors — 1 m, 3 m, or 5 m

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

Compare Products

Model

EG353

Classification

35 kV SEM power supply

60 kV E-Beam power supply

Vacuum chamber power supply

Maximum Output Voltage

Accelerator: -30 kV, 200 µA (-35 kV for conditioning)
Extractor: +10 kV, 400 µA
Suppressor: -1 kV, 100 µA
Heater: +5 V, 3 A

Accelerator: -60 kV, 100 µA
Extractor: +10 kV, 400 µA
Suppressor: -1 kV, 20 µA
Focus: +25 kV, 30 µA
Heater: +5 V, 3 A

7 kV

Maximum Output Power

Accelerator: 6 W
Extractor: 4 W
Suppressor: 0.1 W
Heater: 15 W

Accelerator: 6 W
Extractor: 4 W
Suppressor: 0.2 W
Focus: 0.75 W
Heater: 15 W

115 W

Type

Single Output (non-reversing)

Single Output (non-reversing)

Single Output

Ripple (Best Performance)

Accelerator: < 2 ppm (50 mVpp)
Extractor: < 2 ppm (20 mVpp)
Suppressor: < 30 ppm (30 mVpp)
Heater: LF < 1 mA pp, HF < 5 mVpp with a 1 Ω load

Accelerator: < 2 ppm (75 mVpp)
Extractor: < 4 ppm (35 mVpp)
Suppressor: < 25 ppm (25 mVpp)
Focus: < 4 ppm (100 mV)
Heater: LF < 1 mApp, HF < 5 mVpp with a 1 Ω load

< 4286 ppm (< 30 Vpp)

Volume (Smallest Model)

0.010 m3 (0.366 ft3)

0.042 m3 (1.48 ft3)

4964 cm3 (0.175 ft3)

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.