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Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

The proven Cesar® platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs. Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high-quality components, Cesar RF generators maximize reliability and productivity.


  • Compact, streamlined design and standard platform packaging for easy replacement
  • High efficiency — less heat generated
  • RS-232, Ethernet, and Profibus communication
  • Active front panel with convenient, comprehensive operating menu
  • CEX (phase synch) operation mode


  • Increase process uptime thanks to highly reliable design and quality components
  • Customize performance without custom-unit lead times
  • Enhance operational ease and flexibility


Cooling: Air or water
Output Frequency (MHz, kHz): 2 to 40 MHz
Input Voltage (V): 200 and 400 VAC
Power Level (kW): 0.3 to 5 kW
Rack Width: Full rack
Height (Inches): 2U, 3U
Communications Interface: Analog, RS-232, Ethernet, Profibus
Advanced Features: Active Front Planel, CEX
All Specifications

Technical Documentation


Model Cesar Paramount Paramount Plus
Input Voltage (V) 200 and 400 VAC 208, 400, 480 VAC 208 VAC
Power Level (kW) 0.3 to 5 kW 3 to 15 kW 5 to 15 kW
Communications Interface Analog, RS-232, Ethernet, Profibus EtherCAT, Ethernet, DeviceNet, RS-232 RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
Advanced Features Active Front Planel, CEX Pulsing, CEX, arc management, MBFT Pulsing, arc management, CEX, MBFT
Process Applications Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE


Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Agreement Term Options


Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase


Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit


Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Agreement Term Options


Replace existing, aged, discontinued, or unrepairable devices of any make and model with a new, drop-in solution, which is transparent from a specification and operation standpoint.

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality

Used Equipment

We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.

24/5 Support Available

Get Expert Advice From Our Engineers

We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
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